Zheng Xu

Advisor at ACM Research

Dr. Zheng Xu is an entrepreneur, executive, and investor. He is the founder and CEO of EBOTS Inc, an innovator and manufacturer of intelligent robotics for industrial applications. He was the CEO and co-founder Silevo Inc, a solar cell innovator and photovoltaic (PV) solar module manufacturer. In 2014 Silevo was successfully acquired by SolarCity, a Tesla Company. Dr. Xu has a rich history in both solar and semiconductor industries. He led the development to achieve the world highest conversion efficiency of silicon solar panel in 2015. He also built high volume factories both in the US and China for manufacturing high performance solar panels. Dr. Xu spearheaded various semiconductor equipment developments (e.g. PVD, ALD, CVD) and achieved multi-billion dollar revenues and profitability during his tenure as corporate vice president and general manager of Metal Deposition Business Unit at Applied Materials, Inc. He led the development of the copper metallization technology and equipment, which enabled rapid performance increases and cost reductions in semiconductor industry in early 2000. Dr. Xu also initiated new product development in Xi’an, China, and developed the first 300mm semiconductor equipment in that country. Dr. Xu earned a Ph.D. in materials science from the University of California at Santa Barbara. He also holds a Ph.D. in electrical engineering from Osaka University in Japan. He received his B.S. in semiconductor Physics and devices from Zhejiang University in China. He holds 102 U.S. patents.


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